- Title
- An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material
- Creator
- Fleming, Andrew J.; Yong, Yuen Kuan
- Relation
- IEEE-ASME Transactions on Mechatronics Vol. 22, Issue 6, p. 2611-2618
- Publisher Link
- http://dx.doi.org/10.1109/TMECH.2017.2755659
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2017
- Description
- The paper describes an XY nanopositioning stage constructed from flexures and actuators machined into a single sheet of piezoelectric material. Ultrasonic machining is used to remove piezoelectric material and create electrode features. The constructed device is 0.508 mm thick, and has a travel range of 8.6 μm in the X and Y axes. The first resonance mode occurs at 597 Hz, which makes the device suitable for a wide range of standard nanopositioning applications where cost and size are considerations. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.
- Subject
- nanopositioning; electrodes; force; resonant frequency; machining; microscopy; finite element analysis
- Identifier
- http://hdl.handle.net/1959.13/1395717
- Identifier
- uon:33923
- Identifier
- ISSN:1083-4435
- Language
- eng
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